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Product Name:Alumina Wafer Polishing Plate

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    • Product Details:
      Chemshun Alumina Wafer Polishing Plate/Turn Table is high purity 99.7-99.9%Alumina Ceramic.It's shaped by PIBM. It is one of the semiconductor industry because of its incomparable thermal and dimensional stability,and the resistance to the sever microchip-processing equipment environment.
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    Chemshun Alumina Wafer Polishing Plate/Turn Table is high purity 99.7-99.9%Alumina Ceramic.It's shaped by PIBM. It is one of the semiconductor industry 

    because of its incomparable thermal and dimensional stability,and the resistance to the sever microchip-processing equipment environment. 


    Application:

    As an important component of CMP chemical mechanical polishing process. CMP is the necessary for producing process of the sapphire and Wafer.

    Chemshun Ceramics' alumina ceramics sapphire lapping wafer polishing is shaped as PIBM producing process. Its an internaltional  advanced technology.  PIBM sucessful solve the key problem of crack and deformation of large size alumina ceramics.PIBM technology will open another window of fine ceramics. We not only produce the high quality alumina ceramic wafer polishing plate, but also other series of large size high purity alumina ceramics such as 1200x500x20mm ceramic substrates for LCD manufacturing equipment, semiconductor delviery tracks, vacuum parts, general mechanical parts, bulletproof ceramics. 

    Alumina Wafer Polishing Plate / Turn Table  

    Features :  

    High rigidity (Hardness, Mechanical Strength, Wear Resistance)

    High chemical durability

    Incomparable thermal

    High purity and uniformity

    Surface shape & roughness control

    Pretty Price


     Size:

    Disc, ring size below 850mm, thickness 45mm.

    For example: D150mm, D360mm,D 600mm.

    Customized products with various size are accepted.


    Main Parameter : (Chemical / physical):

    Property

    Item

    Unit

    Chemshun 99.7% Alumina Ceramics

    General Properties

    Main component

    wt%

    99.7-99.9

    Density

    gm/cc

    3.94-3.97

    Color

    -

    Ivory

    Water absorption

    %

    0

    Mechanical Properties

    Flexural Strength(MOR) 20

    Mpa(psix10^3)

    440-550

    Elastic Modulus 20

    GPa (psix10^6)

    375

    Vickers Hardness

    Gpa(kg/mm2) R45N

    >=17

    Bending Strength

    Gpa

    390

    Tensile Strength 25

    MPa(psix10^3

    248

    Fracture Toughness (K I c)

    Mpa* m^1/2

    4-5

    Thermal Properities

    Thermal conductivity(20)

    W/mk

    30

    Coefficient of Thermal expansion(25-1000)

    1x 10^-6/

    7.6

    Thermal Shock Resistance

    ℃(? Tc)

    200

    Maximum use temperature

    1700

    Electrical Properities

    Dielectric Strength (1MHz

    ac-kv/mm(ac v/mil)

    8.7

    Dielectric Constant(1 MHz)

    25

    9.7

    Volume Resistivity

    ohm-cm (25)

    >10^14


    ohm-cm (500)

    2x10^12


    ohm-cm (1000)

    2x10^7


    Photo Reference:

    1-alumina ceramic package .jpg Alumina Wafer Polishing Plate / Turn Table  alumina wafer polishing plate





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    ADD:Non-metal area of shangliuyuan, Economic development zone, pingxiang city, Jiangxi province, P.R.China

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    • Email:office@chemshun.com
    • Non-metal area of shangliuyuan, Economic developmentzone, pingxiang city, Jiangxi province, P.R.China.
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